Fundamental Proximity Effects in Focused Electron Beam Induced Deposition

Harald Plank, Daryl A. Smith, Philip D. Rack, Ferdinand Hofer, Thomas Haber

Research output: Contribution to journal › Article › peer-review

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@article{f1e5bf20c2ac4c96b72c7478b6fc700c,

title = "Fundamental Proximity Effects in Focused Electron Beam Induced Deposition",

author = "Harald Plank and Smith, {Daryl A.} and Rack, {Philip D.} and Ferdinand Hofer and Thomas Haber",

year = "2012",

doi = "10.1021/nn204237h",

language = "English",

volume = "6",

pages = "286--294",

journal = "ACS Nano",

issn = "1936-0851",

publisher = "American Chemical Society",

number = "1",

}