Fundamental proximity effects for electron beam induced deposition processes

Roland Schmied, Christian Gspan, Martina Dienstleder, Stefan Michelitsch, Harald Plank

Research output: Chapter in Book/Report/Conference proceeding › Conference paper › peer-review

Original language	English
Title of host publication	Multinational Congress on Microscopy
Publisher	.
Pages	517-518
Publication status	Published - 2011
Event	Multinational Congress on Microscopy - Graz, Austria Duration: 30 Aug 2009 → 4 Sept 2009

Conference	Multinational Congress on Microscopy
Country/Territory	Austria
City	Graz
Period	30/08/09 → 4/09/09

Fields of Expertise

@inproceedings{bb0421fad2e7494da658f4088d6ba75b,

title = "Fundamental proximity effects for electron beam induced deposition processes",

author = "Roland Schmied and Christian Gspan and Martina Dienstleder and Stefan Michelitsch and Harald Plank",

year = "2011",

language = "English",

pages = "517--518",

booktitle = "Multinational Congress on Microscopy",

publisher = ".",

note = "Multinational Congress on Microscopy ; Conference date: 30-08-2009 Through 04-09-2009",

}

TY - GEN

T1 - Fundamental proximity effects for electron beam induced deposition processes

AU - Schmied, Roland

AU - Gspan, Christian

AU - Dienstleder, Martina

AU - Michelitsch, Stefan

AU - Plank, Harald

PY - 2011

Y1 - 2011

M3 - Conference paper

SP - 517

EP - 518

BT - Multinational Congress on Microscopy

PB - .

T2 - Multinational Congress on Microscopy

Y2 - 30 August 2009 through 4 September 2009

ER -