Field emission as transducer for sub-micron and nano resonators

C. K. Yang, P. J. French, E. Van Der Drift, J. R. Kim, P. Hadley

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Mechanical sensors are more sensitive and responsive when they are made smaller. One of the major concerns in the dimensional scaling process however, is the detection limit of the resonator vibrations. Methods that are available in microresonator devices do not always scale well into sub-micron and nanometre regimes; hence alternative detection schemes are needed for the future resonator devices. In this paper we proposed the use of deviations in field emission current to sense the mechanical displacements in resonating cantilevers. We will present the design, the principle and the fabrication results; scalability, feasibility and challenges of the scheme will also be discussed. Currently the use of field emission on cantilever vibration detection has not been reported yet. This detection method can be an alternative technique for sensor transducers and for studying cantilevers in submicron and nanometre scales.

Original languageEnglish
Title of host publicationProceedings of IEEE Sensors
Pages1207-1210
Number of pages4
DOIs
Publication statusPublished - 2006
Externally publishedYes
Event2006 5th IEEE Conference on Sensors - Daegu, Korea, Republic of
Duration: 22 Oct 200625 Oct 2006

Conference

Conference2006 5th IEEE Conference on Sensors
CountryKorea, Republic of
CityDaegu
Period22/10/0625/10/06

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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