Fabrication of advanced functional devices combining soft chemistry with X-ray lithography in one step

Paolo Falcaro, Luca Malfatti, Lisa Vaccari, Heinz Amenitsch, Benedetto Marmiroli, Gianluca Grenci, Plinio Innocenzi

Research output: Contribution to journalArticleResearchpeer-review

Abstract

Deep X-ray lithography combined with sol-gel techniques offers facile fabrication of controlled patterned films. Using sol-gel, different functional properties can be induced; deep X-ray lithography alters the functionality in the exposed regions. Miniaturized devices based on local property changes are easily fabricated: this technique requires no resist, enabling direct patterning of films in a one-step lithographic process. (Figure Presented).

Original languageEnglish
Pages (from-to)4932-4936
Number of pages5
JournalAdvanced Materials
Volume21
Issue number48
DOIs
Publication statusPublished - 28 Dec 2009
Externally publishedYes

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ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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