Abstract
3D nanoprinting via Focused Electron Beam Induced Deposition 3 D FEBID is one of the few additive, direct write methods capable ofproducing real 3 D objects on the nanoscale With feature sizes below 100 nm on a regular basis and various possibilities in substrate andprecursor materials, it is a highly flexible technique with numerous potential applications 1 2 3 In the past, 3 D FEBID was mainly used forbuilding mesh like structures 4 This project focuses on the expansion towards closed structures, where additional growth affecting factors, suchas edge effects and more advanced temperature distributions apply (Fig 1 We approach the situation with a combination of experiments andsimulations to develop a compensation tool for arising challenges, which forms the basis of next generation 3 D nanoprinting via electrons 5
Original language | English |
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Publication status | Published - 21 Apr 2022 |
Event | 12th ASEM Workshop: Austrian Society for Electron Microscopy - JKU Linz, Linz, Austria Duration: 21 Apr 2022 → 22 Apr 2022 https://asem.at/events/12th-asem-workshop/ |
Conference
Conference | 12th ASEM Workshop |
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Country/Territory | Austria |
City | Linz |
Period | 21/04/22 → 22/04/22 |
Internet address |
ASJC Scopus subject areas
- General Materials Science
Fields of Expertise
- Advanced Materials Science
Treatment code (Nähere Zuordnung)
- Basic - Fundamental (Grundlagenforschung)