Evaluation of thermal and growth stresses in heteroepitaxial AlN thin films formed on (0001) sapphire by pulsed laser ablation

J. Keckes, S. Six, W. Tesch, Roland Resel, B. Rauschenbach

Institute of Solid State Physics (5130)

Research output: Contribution to journal › Article › peer-review

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High temperature attachment for 4-circle x-ray diffractometers
Eiper, E., Sonderegger, B., Resel, R., Koini, M. & Tamas, E.
1/01/00 → …
Project: Research area