Evaluation of thermal and growth stresses in heteroepitaxial AlN thin films formed on (0001) sapphire by pulsed laser ablation

J. Keckes, S. Six, W. Tesch, Roland Resel, B. Rauschenbach

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)80-86
JournalJournal of Crystal Growth
Volume240
Issue number1-2
Publication statusPublished - 2002

Cite this