Elemental mapping of semiconductor devices using energyfiltering transmission electron microscopy

Werner Grogger, Ferdinand Hofer, Peter Warbichler, O. Leitner

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationMicroscopy of semiconducting materials 1999
Place of PublicationBristol
PublisherInstitute of Physics Publ.
Pages35-38
Volume164
ISBN (Print)0-7503-0650-5
Publication statusPublished - 1999
EventConference on Microscopy of Semiconducting Materials - Oxford, United Kingdom
Duration: 22 Mar 199925 Mar 1999

Publication series

NameInstitute of Physics conference series
PublisherInstitute of Physics Publ.

Conference

ConferenceConference on Microscopy of Semiconducting Materials
CountryUnited Kingdom
CityOxford
Period22/03/9925/03/99

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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