Elemental mapping of semiconductor devices using energy-filtering TEM

Research output: Contribution to conferencePosterResearch

Original languageEnglish
Publication statusPublished - 1999
Event11.Internationale Conference on Microscopy of Semiconductig Materials - Oxford
Duration: 22 Mar 199925 Mar 1999

Conference

Conference11.Internationale Conference on Microscopy of Semiconductig Materials
CityOxford
Period22/03/9925/03/99

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

Cite this

Grogger, W. (1999). Elemental mapping of semiconductor devices using energy-filtering TEM. Poster session presented at 11.Internationale Conference on Microscopy of Semiconductig Materials, Oxford, .

Elemental mapping of semiconductor devices using energy-filtering TEM. / Grogger, Werner.

1999. Poster session presented at 11.Internationale Conference on Microscopy of Semiconductig Materials, Oxford, .

Research output: Contribution to conferencePosterResearch

Grogger, W 1999, 'Elemental mapping of semiconductor devices using energy-filtering TEM' 11.Internationale Conference on Microscopy of Semiconductig Materials, Oxford, 22/03/99 - 25/03/99, .
Grogger W. Elemental mapping of semiconductor devices using energy-filtering TEM. 1999. Poster session presented at 11.Internationale Conference on Microscopy of Semiconductig Materials, Oxford, .
Grogger, Werner. / Elemental mapping of semiconductor devices using energy-filtering TEM. Poster session presented at 11.Internationale Conference on Microscopy of Semiconductig Materials, Oxford, .
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title = "Elemental mapping of semiconductor devices using energy-filtering TEM",
author = "Werner Grogger",
year = "1999",
language = "English",
note = "11.Internationale Conference on Microscopy of Semiconductig Materials ; Conference date: 22-03-1999 Through 25-03-1999",

}

TY - CONF

T1 - Elemental mapping of semiconductor devices using energy-filtering TEM

AU - Grogger, Werner

PY - 1999

Y1 - 1999

M3 - Poster

ER -