Elemental mapping of semiconductor devices using energy-filtering TEM

Research output: Contribution to conference › Poster

Original language	English
Publication status	Published - 1999
Event	11.Internationale Conference on Microscopy of Semiconductig Materials - Oxford, United Kingdom Duration: 22 Mar 1999 → 25 Mar 1999

Conference	11.Internationale Conference on Microscopy of Semiconductig Materials
Country/Territory	United Kingdom
City	Oxford
Period	22/03/99 → 25/03/99

Treatment code (Nähere Zuordnung)