Elemental mapping of semiconductor devices using energy-filtering TEM

Research output: Contribution to conferencePoster

Original languageEnglish
Publication statusPublished - 1999
Event11.Internationale Conference on Microscopy of Semiconductig Materials - Oxford, United Kingdom
Duration: 22 Mar 199925 Mar 1999

Conference

Conference11.Internationale Conference on Microscopy of Semiconductig Materials
CountryUnited Kingdom
CityOxford
Period22/03/9925/03/99

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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