Electron-Irradiation Damage in Chromium Nitrides and Chromium Oxynitride Thin Films

Christoph Mitterbauer, Werner Grogger, Peter Wilhartitz, Ferdinand Hofer

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)385-388
JournalMicron
Volume37
Publication statusPublished - 2006

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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