Electron-Irradiation Damage in Chromium Nitrides and Chromium Oxynitride Thin Films

Christoph Mitterbauer, Werner Grogger, Peter Wilhartitz, Ferdinand Hofer

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@article{bf75569d2390493d85af2a773c9c9522,

title = "Electron-Irradiation Damage in Chromium Nitrides and Chromium Oxynitride Thin Films",

author = "Christoph Mitterbauer and Werner Grogger and Peter Wilhartitz and Ferdinand Hofer",

year = "2006",

language = "English",

volume = "37",

pages = "385--388",

journal = "Micron",

issn = "0968-4328",

publisher = "Elsevier Limited",

}