Electrically detected magnetic resonance study on defects in Si pn-junctions created by proton implantation

Gernot Gruber, Stefan Kirnstötter, Peter Hadley, Markus Koch, Thomas Aichinger, Holger Schulze, Werner Schustereder

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@article{42ac06af4adf41178828885a9614464a,

title = "Electrically detected magnetic resonance study on defects in Si pn-junctions created by proton implantation",

author = "Gernot Gruber and Stefan Kirnst{\"o}tter and Peter Hadley and Markus Koch and Thomas Aichinger and Holger Schulze and Werner Schustereder",

year = "2014",

doi = "10.1002/pssc.201400053",

language = "English",

pages = "1--4",

journal = "Physica Status Solidi / C",

issn = "1610-1634",

publisher = "Wiley-VCH ",

}

TY - JOUR

T1 - Electrically detected magnetic resonance study on defects in Si pn-junctions created by proton implantation

AU - Gruber, Gernot

AU - Kirnstötter, Stefan

AU - Hadley, Peter

AU - Koch, Markus

AU - Aichinger, Thomas

AU - Schulze, Holger

AU - Schustereder, Werner

PY - 2014

Y1 - 2014

UR - http://onlinelibrary.wiley.com/doi/10.1002/pssc.201400053/abstract

U2 - 10.1002/pssc.201400053

DO - 10.1002/pssc.201400053

M3 - Article

SP - 1

EP - 4

JO - Physica Status Solidi / C

JF - Physica Status Solidi / C

SN - 1610-1634

ER -