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### Abstract

This work proposes a computationally ecient observation algorithm for the surface temperature profile of heated silicon wafers. The observer exploits the fact that only a few modes of the original large-order model are unstable or slowly converging. In this case, it suffices to modify only these modes by the observer's output feedback gain. Compared to classical observation techniques, the proposed method allows to compute the feedback gain for a state space of lower dimension, which reduces computational complexity. A comparison of the approach with the extended Kalman-Bucy filter using experimental data shows its appealing

performance.

performance.

Original language | English |
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Title of host publication | IFAC-PapersOnLine: Proceedings of the 21st IFAC World Congress |

Number of pages | 6 |

Publication status | Accepted/In press - 13 Jul 2020 |

Event | 21st IFAC World Congress - Virtuell, Germany Duration: 12 Jul 2020 → 17 Jul 2020 |

### Conference

Conference | 21st IFAC World Congress |
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Abbreviated title | IFAC 2020 |

Country | Germany |

City | Virtuell |

Period | 12/07/20 → 17/07/20 |

### Keywords

- subspace observer design
- Lyapunov exponents
- Nonlinear systems
- Extended Kalman-Bucy Filter
- linear time varying systems
- reduced Riccati equation
- wafer temperature estimation
- rapid thermal processing

## Fingerprint Dive into the research topics of 'Efficient Temperature Profile Estimation for Silicon Wafers based on Subspace Observers'. Together they form a unique fingerprint.

## Projects

- 1 Active

### Dependable Internet of Things

Boano, C. A., Kubin, G., Bloem, R., Horn, M., Pernkopf, F., Zakany, N., Mangard, S., Witrisal, K., Römer, K. U., Aichernig, B., Bösch, W., Baunach, M. C., Tappler, M., Malenko, M., Weiser, S., Eichlseder, M., Leitinger, E., Grosinger, J., Großwindhager, B., Ebrahimi, M., Alothman Alterkawi, A. B., Knoll, C., Teschl, R., Saukh, O., Rath, M., Steinberger, M., Steinbauer, G. & Tranninger, M.

1/01/16 → 31/03/22

Project: Research project

## Cite this

Tranninger, M., Seeber, R., Steinberger, M., & Horn, M. (Accepted/In press). Efficient Temperature Profile Estimation for Silicon Wafers based on Subspace Observers. In

*IFAC-PapersOnLine: Proceedings of the 21st IFAC World Congress*