Abstract
Within this abstract, we present a new way to determine 휁-factors for EDXS quantification experimentally for both light and heavy elements. With this approach, we eliminate the necessity of knowing the thickness of the reference sample, which is very often a crucial issue during 휁-factor determination.
The correct determination of the element concentration in a material via energy-dispersive X-ray spectrometry (EDXS) stands or falls on the precision of the quantification method. There are two established methods within the TEM community: the conventional Cliff-Lorimer technique [1] and the newer 휁-factor method [2]. The latter provides not only elemental concentrations but also the mass-thickness of the observed specimen area as results. Furthermore, a proper absorption correction for low energy X-rays is implemented, which makes it more accurate for the quantification of light elements. A precondition for using this method is the determination of correct sensitivity factors, the so-called 휁-factors. However, the determination of accurate values for light elements is a complex and challenging task, which is the reason, why the method is unfortunately not as commonly used as suspected regarding its major advantage of a built-in absorption correction.
The correct determination of the element concentration in a material via energy-dispersive X-ray spectrometry (EDXS) stands or falls on the precision of the quantification method. There are two established methods within the TEM community: the conventional Cliff-Lorimer technique [1] and the newer 휁-factor method [2]. The latter provides not only elemental concentrations but also the mass-thickness of the observed specimen area as results. Furthermore, a proper absorption correction for low energy X-rays is implemented, which makes it more accurate for the quantification of light elements. A precondition for using this method is the determination of correct sensitivity factors, the so-called 휁-factors. However, the determination of accurate values for light elements is a complex and challenging task, which is the reason, why the method is unfortunately not as commonly used as suspected regarding its major advantage of a built-in absorption correction.
Original language | English |
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Pages | 734 |
Publication status | Published - 2020 |
Event | Virtual Early Career European Microscopy Congress 2020: EMC 2020 - Virtuell, United Kingdom Duration: 24 Nov 2020 → 26 Nov 2020 https://www.emc2020.eu/virtual-conference/conference-programme.html |
Conference
Conference | Virtual Early Career European Microscopy Congress 2020 |
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Abbreviated title | EMC 2020 |
Country/Territory | United Kingdom |
Period | 24/11/20 → 26/11/20 |
Internet address |
ASJC Scopus subject areas
- Materials Science(all)
Fields of Expertise
- Advanced Materials Science
Treatment code (Nähere Zuordnung)
- Basic - Fundamental (Grundlagenforschung)