EDX quantification in the TEM: How to measure ζ-factors without knowing the sample thickness

Within this abstract, we present a new way to determine 휁-factors for EDXS quantification experimentally for both light and heavy elements. With this approach, we eliminate the necessity of knowing the thickness of the reference sample, which is very often a crucial issue during 휁-factor determination.

The correct determination of the element concentration in a material via energy-dispersive X-ray spectrometry (EDXS) stands or falls on the precision of the quantification method. There are two established methods within the TEM community: the conventional Cliff-Lorimer technique [1] and the newer 휁-factor method [2]. The latter provides not only elemental concentrations but also the mass-thickness of the observed specimen area as results. Furthermore, a proper absorption correction for low energy X-rays is implemented, which makes it more accurate for the quantification of light elements. A precondition for using this method is the determination of correct sensitivity factors, the so-called 휁-factors. However, the determination of accurate values for light elements is a complex and challenging task, which is the reason, why the method is unfortunately not as commonly used as suspected regarding its major advantage of a built-in absorption correction.