@inproceedings{1e7c658b24914a8eb2a598963124f2f9,
title = "Direct-Write Fabrication of Electric and Thermal High-Resolution Nano-Probes on Self-Sensing AFM Cantilever",
author = "J{\"u}rgen Sattelkow and Johannes Fr{\"o}ch and Harald Plank",
year = "2017",
month = may,
day = "30",
language = "English",
booktitle = "The 61 st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication",
note = "The 61st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication 2017, EIPBN 2017 ; Conference date: 30-05-2017 Through 02-06-2017",
}