Direct-Write Fabrication of Electric and Thermal High-Resolution Nano-Probes on Self-Sensing AFM Cantilever

Jürgen Sattelkow, Johannes Fröch, Harald Plank

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	The 61 st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication
Chapter	2A5
Number of pages	2
Publication status	Published - 30 May 2017
Event	The 61st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication 2017 - Walt Disney World Coronado Springs Resort, Orlando, Florida, United States Duration: 30 May 2017 → 2 Jun 2017

Conference	The 61st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication 2017
Abbreviated title	EIPBN 2017
Country	United States
City	Orlando, Florida
Period	30/05/17 → 2/06/17

ASJC Scopus subject areas

Sattelkow, J, Fröch, J & Plank, H 2017, Direct-Write Fabrication of Electric and Thermal High-Resolution Nano-Probes on Self-Sensing AFM Cantilever. in The 61 st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication. The 61st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication 2017, Orlando, Florida, United States, 30/05/17.

@inproceedings{1e7c658b24914a8eb2a598963124f2f9,

title = "Direct-Write Fabrication of Electric and Thermal High-Resolution Nano-Probes on Self-Sensing AFM Cantilever",

author = "J{\"u}rgen Sattelkow and Johannes Fr{\"o}ch and Harald Plank",

year = "2017",

month = "5",

day = "30",

language = "English",

booktitle = "The 61 st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication",

}