Direct-Write Fabrication of Electric and Thermal High-Resolution Nano-Probes on Self-Sensing AFM Cantilever

Jürgen Sattelkow, Johannes Fröch, Harald Plank

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationThe 61 st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication
Chapter2A5
Number of pages2
Publication statusPublished - 30 May 2017
EventThe 61st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication 2017 - Walt Disney World Coronado Springs Resort, Orlando, Florida, United States
Duration: 30 May 20172 Jun 2017

Conference

ConferenceThe 61st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication 2017
Abbreviated title EIPBN 2017
CountryUnited States
CityOrlando, Florida
Period30/05/172/06/17

ASJC Scopus subject areas

  • Materials Science(all)

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Application

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