Direct nano-in-micro patterning of TiO2 thin layers and TiO2/Pt nano electrode arrays by Deep X-ray Lithography

Marco Faustini; Benedetta Marmiroli; Luca Malfatti; Benjamin Louis; Natacha Krins; Paolo Falcaro; Gianluca Grenci; Christel Laberty-Robert; Heinz Amenitsch; Plinio Innocenzi; David Grosso

doi:10.1039/c0jm03493b

Direct nano-in-micro patterning of TiO2 thin layers and TiO2/Pt nano electrode arrays by Deep X-ray Lithography

Marco Faustini, Benedetta Marmiroli, Luca Malfatti, Benjamin Louis, Natacha Krins, Paolo Falcaro, Gianluca Grenci, Christel Laberty-Robert, Heinz Amenitsch, Plinio Innocenzi, David Grosso

Institute of Inorganic Chemistry (6330)

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	3597-3603
Journal	Journal of Materials Chemistry
Volume	21
DOIs	https://doi.org/10.1039/c0jm03493b
Publication status	Published - 2011

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Experimental
Application

Access to Document

10.1039/c0jm03493b

Cite this

@article{16db512ca13641c084c10442dbed8ab4,

title = "Direct nano-in-micro patterning of TiO2 thin layers and TiO2/Pt nano electrode arrays by Deep X-ray Lithography",

author = "Marco Faustini and Benedetta Marmiroli and Luca Malfatti and Benjamin Louis and Natacha Krins and Paolo Falcaro and Gianluca Grenci and Christel Laberty-Robert and Heinz Amenitsch and Plinio Innocenzi and David Grosso",

year = "2011",

doi = "10.1039/c0jm03493b",

language = "English",

volume = "21",

pages = "3597--3603",

journal = "Journal of Materials Chemistry",

issn = "1364-5501",

publisher = "Royal Society of Chemistry",

}

TY - JOUR

T1 - Direct nano-in-micro patterning of TiO2 thin layers and TiO2/Pt nano electrode arrays by Deep X-ray Lithography

AU - Faustini, Marco

AU - Marmiroli, Benedetta

AU - Malfatti, Luca

AU - Louis, Benjamin

AU - Krins, Natacha

AU - Falcaro, Paolo

AU - Grenci, Gianluca

AU - Laberty-Robert, Christel

AU - Amenitsch, Heinz

AU - Innocenzi, Plinio

AU - Grosso, David

PY - 2011

Y1 - 2011

U2 - 10.1039/c0jm03493b

DO - 10.1039/c0jm03493b

M3 - Article

SN - 1364-5501

VL - 21

SP - 3597

EP - 3603

JO - Journal of Materials Chemistry

JF - Journal of Materials Chemistry

ER -