Depletion of superjunction power MOSFETs visualized by electron beam induced current and voltage contrast measurements

Stefan Kirnstötter; Martin Faccinelli; Moriz Jelinek; Werner Schustereder; Johannes G. Laven; Hans-Joachim Schulze; Peter Hadley

doi:DOI: 10.1002/pssc.201400050

Depletion of superjunction power MOSFETs visualized by electron beam induced current and voltage contrast measurements

Stefan Kirnstötter, Martin Faccinelli, Moriz Jelinek, Werner Schustereder, Johannes G. Laven, Hans-Joachim Schulze, Peter Hadley

Institute of Solid State Physics (5130)

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	1610-1642
Journal	Physica status solidi / C
Volume	1
DOIs	https://doi.org/DOI: 10.1002/pssc.201400050
Publication status	Published - 2014

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Application
Experimental

Access to Document

DOI: 10.1002/pssc.201400050

http://onlinelibrary.wiley.com/doi/10.1002/pssc.201400050/abstract

Cite this

Depletion of superjunction power MOSFETs visualized by electron beam induced current and voltage contrast measurements. / Kirnstötter, Stefan; Faccinelli, Martin; Jelinek, Moriz; Schustereder, Werner; Laven, Johannes G.; Schulze, Hans-Joachim; Hadley, Peter.

In: Physica status solidi / C, Vol. 1, 2014, p. 1610-1642.

Research output: Contribution to journal › Article

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AU - Kirnstötter, Stefan

AU - Faccinelli, Martin

AU - Jelinek, Moriz

AU - Schustereder, Werner

AU - Laven, Johannes G.

AU - Schulze, Hans-Joachim

AU - Hadley, Peter

PY - 2014

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DO - DOI: 10.1002/pssc.201400050

M3 - Article

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EP - 1642

JO - Physica status solidi / C

JF - Physica status solidi / C

SN - 1862-6351

ER -