Depletion of superjunction power MOSFETs visualized by electron beam induced current and voltage contrast measurements

Stefan Kirnstötter, Martin Faccinelli, Moriz Jelinek, Werner Schustereder, Johannes G. Laven, Hans-Joachim Schulze, Peter Hadley

Research output: Contribution to journal › Article › Research › peer-review

Original languageEnglish
Pages (from-to)1610-1642
JournalPhysica status solidi / C
Volume1
DOIs
Publication statusPublished - 2014

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Application
  • Experimental

Cite this

Depletion of superjunction power MOSFETs visualized by electron beam induced current and voltage contrast measurements. / Kirnstötter, Stefan; Faccinelli, Martin; Jelinek, Moriz; Schustereder, Werner; Laven, Johannes G.; Schulze, Hans-Joachim; Hadley, Peter.

In: Physica status solidi / C, Vol. 1, 2014, p. 1610-1642.

Research output: Contribution to journal › Article › Research › peer-review

Kirnstötter, S, Faccinelli, M, Jelinek, M, Schustereder, W, Laven, JG, Schulze, H-J & Hadley, P 2014, 'Depletion of superjunction power MOSFETs visualized by electron beam induced current and voltage contrast measurements' Physica status solidi / C, vol. 1, pp. 1610-1642. https://doi.org/DOI: 10.1002/pssc.201400050
Kirnstötter S, Faccinelli M, Jelinek M, Schustereder W, Laven JG, Schulze H-J et al. Depletion of superjunction power MOSFETs visualized by electron beam induced current and voltage contrast measurements. Physica status solidi / C. 2014;1:1610-1642. https://doi.org/DOI: 10.1002/pssc.201400050
Kirnstötter, Stefan ; Faccinelli, Martin ; Jelinek, Moriz ; Schustereder, Werner ; Laven, Johannes G. ; Schulze, Hans-Joachim ; Hadley, Peter. / Depletion of superjunction power MOSFETs visualized by electron beam induced current and voltage contrast measurements. In: Physica status solidi / C. 2014 ; Vol. 1. pp. 1610-1642.
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AU - Kirnstötter, Stefan

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AU - Schustereder, Werner

AU - Laven, Johannes G.

AU - Schulze, Hans-Joachim

AU - Hadley, Peter

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