Depletion of superjunction power MOSFETs visualized by electron beam induced current and voltage contrast measurements

Stefan Kirnstötter, Martin Faccinelli, Moriz Jelinek, Werner Schustereder, Johannes G. Laven, Hans-Joachim Schulze, Peter Hadley

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)1610-1642
JournalPhysica status solidi / C
Volume1
DOIs
Publication statusPublished - 2014

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Application
  • Experimental

Cite this

Depletion of superjunction power MOSFETs visualized by electron beam induced current and voltage contrast measurements. / Kirnstötter, Stefan; Faccinelli, Martin; Jelinek, Moriz; Schustereder, Werner; Laven, Johannes G.; Schulze, Hans-Joachim; Hadley, Peter.

In: Physica status solidi / C, Vol. 1, 2014, p. 1610-1642.

Research output: Contribution to journalArticleResearchpeer-review

Kirnstötter, Stefan ; Faccinelli, Martin ; Jelinek, Moriz ; Schustereder, Werner ; Laven, Johannes G. ; Schulze, Hans-Joachim ; Hadley, Peter. / Depletion of superjunction power MOSFETs visualized by electron beam induced current and voltage contrast measurements. In: Physica status solidi / C. 2014 ; Vol. 1. pp. 1610-1642.
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AU - Kirnstötter, Stefan

AU - Faccinelli, Martin

AU - Jelinek, Moriz

AU - Schustereder, Werner

AU - Laven, Johannes G.

AU - Schulze, Hans-Joachim

AU - Hadley, Peter

PY - 2014

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JO - Physica status solidi / C

JF - Physica status solidi / C

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