Depletion of superjunction power MOSFETs visualized by electron beam induced current and voltage contrast measurements

Stefan Kirnstötter; Martin Faccinelli; Moriz Jelinek; Werner Schustereder; Johannes G. Laven; Hans-Joachim Schulze; Peter Hadley

doi:DOI: 10.1002/pssc.201400050

Depletion of superjunction power MOSFETs visualized by electron beam induced current and voltage contrast measurements

Stefan Kirnstötter, Martin Faccinelli, Moriz Jelinek, Werner Schustereder, Johannes G. Laven, Hans-Joachim Schulze, Peter Hadley

Institute of Solid State Physics (5130)

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1610-1642
Journal	Physica Status Solidi / C
Volume	1
DOIs	https://doi.org/DOI: 10.1002/pssc.201400050
Publication status	Published - 2014

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Application
Experimental

Access to Document

DOI: 10.1002/pssc.201400050

Cite this

Depletion of superjunction power MOSFETs visualized by electron beam induced current and voltage contrast measurements. / Kirnstötter, Stefan; Faccinelli, Martin; Jelinek, Moriz; Schustereder, Werner; Laven, Johannes G.; Schulze, Hans-Joachim; Hadley, Peter.

In: Physica Status Solidi / C, Vol. 1, 2014, p. 1610-1642.

Research output: Contribution to journal › Article › peer-review

@article{2b5875b86b9441828602aeccbe65fabd,

title = "Depletion of superjunction power MOSFETs visualized by electron beam induced current and voltage contrast measurements",

author = "Stefan Kirnst{\"o}tter and Martin Faccinelli and Moriz Jelinek and Werner Schustereder and Laven, {Johannes G.} and Hans-Joachim Schulze and Peter Hadley",

year = "2014",

doi = "DOI: 10.1002/pssc.201400050",

language = "English",

volume = "1",

pages = "1610--1642",

journal = "Physica Status Solidi / C",

issn = "1610-1634",

publisher = "Wiley-VCH ",

}

TY - JOUR

T1 - Depletion of superjunction power MOSFETs visualized by electron beam induced current and voltage contrast measurements

AU - Kirnstötter, Stefan

AU - Faccinelli, Martin

AU - Jelinek, Moriz

AU - Schustereder, Werner

AU - Laven, Johannes G.

AU - Schulze, Hans-Joachim

AU - Hadley, Peter

PY - 2014

Y1 - 2014

UR - http://onlinelibrary.wiley.com/doi/10.1002/pssc.201400050/abstract

U2 - DOI: 10.1002/pssc.201400050

DO - DOI: 10.1002/pssc.201400050

M3 - Article

VL - 1

SP - 1610

EP - 1642

JO - Physica Status Solidi / C

JF - Physica Status Solidi / C

SN - 1610-1634

ER -

Depletion of superjunction power MOSFETs visualized by electron beam induced current and voltage contrast measurements

Fields of Expertise

Treatment code (Nähere Zuordnung)

Access to Document

Other files and links

Cite this