Copper oxidation studied by in Situ Raman Spectroscopy

Robert Schennach, Andreas Gupper

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationMaterials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics--2003
Publisher.
PagesE3.2.1-E3.2.6
Publication statusPublished - 2003
EventMaterials Research Society symposium proceedings - San Francisco, United States
Duration: 20 Mar 200325 Mar 2003

Conference

ConferenceMaterials Research Society symposium proceedings
CountryUnited States
CitySan Francisco
Period20/03/0325/03/03

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