Controlled three dimensional deposition of functional materials by Atmospheric Pressure Ion Deposition

Thomas Steindl, Thomas E. Hamedinger, Andreas Gupper, Peter Wilhelm, Stephan Rentenberger, Egbert Zojer, Robert Saf

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publication7th International Conference on Nanostructured Materials - LMC
Place of PublicationFrankfurt am Main/Germany
PublisherDruckhaus K. Schmitt Wwe.
Pages36-36
Publication statusPublished - 2004

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