Original language | English |
---|---|
Pages (from-to) | 2629-2631 |
Journal | Microelectronic Engineering |
Volume | 88 |
DOIs | |
Publication status | Published - 2011 |
Fields of Expertise
- Sonstiges
S. Hassan M. Jafri, Tobias Blom, Andreas Wallner, Ken Welch, Maria Stromme, Henrik Ottosson, Klaus Leifer
Research output: Contribution to journal › Article › peer-review
Original language | English |
---|---|
Pages (from-to) | 2629-2631 |
Journal | Microelectronic Engineering |
Volume | 88 |
DOIs | |
Publication status | Published - 2011 |