Comparsion of 3D surface reconstruction data obtained by conventional SEM, ESEM and an infinite focus microscope(IFM)

Hartmuth Schröttner, Mario Schmied, Stefan Scherer

Research output: Contribution to conference › Poster

Original language	English
Publication status	Published - 2005
Event	European Workshop on Modern Developments and Applications in Microbeam Analysis - Florence, Italy Duration: 22 May 2005 → 26 May 2005

Conference	European Workshop on Modern Developments and Applications in Microbeam Analysis
Country/Territory	Italy
City	Florence
Period	22/05/05 → 26/05/05

Cite this

@conference{06eb4f31851549fc82916b8d48476046,

title = "Comparsion of 3D surface reconstruction data obtained by conventional SEM, ESEM and an infinite focus microscope(IFM)",

author = "Hartmuth Schr{\"o}ttner and Mario Schmied and Stefan Scherer",

year = "2005",

language = "English",

note = "European Workshop on Modern Developments and Applications in Microbeam Analysis ; Conference date: 22-05-2005 Through 26-05-2005",

}