Comparison of 3D Surface Reconstruction Data from Certified Depth Standards Obtained by SEM and an Infinite Focus Measurement Machine (IFM)

Hartmuth Schröttner; Mario Schmied; Stefan Scherer

doi:10.1007/s00604-006-0556-3

Comparison of 3D Surface Reconstruction Data from Certified Depth Standards Obtained by SEM and an Infinite Focus Measurement Machine (IFM)

Hartmuth Schröttner, Mario Schmied, Stefan Scherer

Institute of Electron Microscopy and Nanoanalysis (5190)

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	279-284
Journal	Microchimica Acta
Volume	155
DOIs	https://doi.org/10.1007/s00604-006-0556-3
Publication status	Published - 2006

Treatment code (Nähere Zuordnung)

Basic - Fundamental (Grundlagenforschung)

Access to Document

10.1007/s00604-006-0556-3

Cite this

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title = "Comparison of 3D Surface Reconstruction Data from Certified Depth Standards Obtained by SEM and an Infinite Focus Measurement Machine (IFM)",

author = "Hartmuth Schr{\"o}ttner and Mario Schmied and Stefan Scherer",

note = "ISS 0026-3672 (Print) 1436-5073 (Online)",

year = "2006",

doi = "10.1007/s00604-006-0556-3",

language = "English",

volume = "155",

pages = "279--284",

journal = "Microchimica Acta",

issn = "1436-5073",

publisher = "Springer",

}

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AU - Schröttner, Hartmuth

AU - Schmied, Mario

AU - Scherer, Stefan

N1 - ISS 0026-3672 (Print) 1436-5073 (Online)

PY - 2006

Y1 - 2006

U2 - 10.1007/s00604-006-0556-3

DO - 10.1007/s00604-006-0556-3

M3 - Article

SN - 1436-5073

VL - 155

SP - 279

EP - 284

JO - Microchimica Acta

JF - Microchimica Acta

ER -