Comparison of 3D Surface Reconstruction Data from Certified Depth Standards Obtained by SEM and an Infinite Focus Measurement Machine (IFM)

Hartmuth Schröttner, Mario Schmied, Stefan Scherer

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)279-284
JournalMicrochimica acta
Volume155
DOIs
Publication statusPublished - 2006

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

Cite this