Comparative Study of LNO, LSCO and LSMO as Electrode Layers for Microelectronic Capacitors by Dynamic SIMS

Christoph Pollak, Klaus Reichmann, Herbert Hutter

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)119-124
JournalSurface and Coatings Technology
Volume150
Publication statusPublished - 2002

Treatment code (Nähere Zuordnung)

  • Application

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