Comparative Study of LNO, LSCO and LSMO as Electrode Layers for Microelectronic Capacitors by Dynamic SIMS

Christoph Pollak, Klaus Reichmann, Herbert Hutter

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Original languageEnglish
Pages (from-to)119-124
JournalSurface & coatings technology
Volume150
Publication statusPublished - 2002

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Comparative Study of LNO, LSCO and LSMO as Electrode Layers for Microelectronic Capacitors by Dynamic SIMS. / Pollak, Christoph; Reichmann, Klaus; Hutter, Herbert.

In: Surface & coatings technology, Vol. 150, 2002, p. 119-124.

Research output: Contribution to journalArticleResearchpeer-review

@article{a9cf6985171e4e8ba0178306070f6380,
title = "Comparative Study of LNO, LSCO and LSMO as Electrode Layers for Microelectronic Capacitors by Dynamic SIMS",
author = "Christoph Pollak and Klaus Reichmann and Herbert Hutter",
year = "2002",
language = "English",
volume = "150",
pages = "119--124",
journal = "Surface & coatings technology",
issn = "0257-8972",
publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Comparative Study of LNO, LSCO and LSMO as Electrode Layers for Microelectronic Capacitors by Dynamic SIMS

AU - Pollak, Christoph

AU - Reichmann, Klaus

AU - Hutter, Herbert

PY - 2002

Y1 - 2002

M3 - Article

VL - 150

SP - 119

EP - 124

JO - Surface & coatings technology

JF - Surface & coatings technology

SN - 0257-8972

ER -