Characterization of silicon wafer surfaces by FTIR-, XPS-spectroscopy and contact angle measurements

Thomas Bodner, Andreas Behrendt, Emil Prax, Frank Wiesbrock, Franz Stelzer

Institute for Chemistry and Technology of Materials (6380)

Research output: Contribution to conference › Poster

1 results

Finished
Surface chemistry and adhesive properties of designed photoresist polymers
Fimberger, M., Mühlbacher, I., Stelzer, F., Schenk, V. & Wiesbrock, F.
1/01/10 → 31/12/13
Project: Research project