Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers

Christian Ganser, Gerhard Fritz-Popovski, R Morak, Parvin Sharifi, Benedetta Marmiroli, Barbara Sartori, Heinz Amenitsch, Thomas Grießer, Teichert Christian, Oskar Paris

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Article number7
Pages (from-to)637
Number of pages644
JournalBeilstein Journal of Nanotechnology
Issue number7
DOIs
Publication statusPublished - 2016

Keywords

  • Mesoporous films
  • Humidity sensor

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy(all)

Fields of Expertise

  • Advanced Materials Science

Cite this

Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers. / Ganser, Christian; Fritz-Popovski, Gerhard; Morak, R; Sharifi, Parvin; Marmiroli, Benedetta; Sartori, Barbara; Amenitsch, Heinz; Grießer, Thomas; Christian, Teichert; Paris, Oskar.

In: Beilstein Journal of Nanotechnology , No. 7, 7, 2016, p. 637.

Research output: Contribution to journalArticleResearchpeer-review

Ganser, Christian ; Fritz-Popovski, Gerhard ; Morak, R ; Sharifi, Parvin ; Marmiroli, Benedetta ; Sartori, Barbara ; Amenitsch, Heinz ; Grießer, Thomas ; Christian, Teichert ; Paris, Oskar. / Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers. In: Beilstein Journal of Nanotechnology . 2016 ; No. 7. pp. 637.
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AU - Sartori, Barbara

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