Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers

Christian Ganser, Gerhard Fritz-Popovski, R Morak, Parvin Sharifi, Benedetta Marmiroli, Barbara Sartori, Heinz Amenitsch, Thomas Grießer, Teichert Christian, Oskar Paris

Research output: Contribution to journalArticle

Original languageEnglish
Article number7
Pages (from-to)637
Number of pages644
JournalBeilstein Journal of Nanotechnology
Issue number7
DOIs
Publication statusPublished - 2016

Keywords

  • Mesoporous films
  • Humidity sensor

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy(all)

Fields of Expertise

  • Advanced Materials Science

Cite this