Broadband measurement of ESD risetimes to distinguish between different discharge mechanisms

Sven Bonisch, David Pommerenke, Wilfried Kalkner

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Different discharge mechanisms are possible for ESD (electrostatic discharge) below 2 kV breakdown voltage as a function of the parameters gap distance, breakdown voltage, electrode material and gas pressure. In this paper, risetime measurement data of electrostatic discharges, measured at about 8 GHz bandwidth, are presented as a function of these parameters. Electrode SEM photographs (scanning electron microscope) helps to understand the influence of electrode surface. This provides information about the development of ESD and helps to increase their reproducibility.

Original languageEnglish
Title of host publicationElectrical Overstress/Electrostatic Discharge Symposium Proceedings, EOS/ESD 2001
PublisherESD Association
Pages371-382
Number of pages12
ISBN (Electronic)1585370398
Publication statusPublished - 1 Jan 2001
Externally publishedYes
EventElectrical Overstress/Electrostatic Discharge Symposium Proceedings, EOS/ESD 2001 - Portland, United States
Duration: 11 Sep 200113 Sep 2001

Publication series

NameElectrical Overstress/Electrostatic Discharge Symposium Proceedings
Volume2001-January
ISSN (Print)0739-5159

Conference

ConferenceElectrical Overstress/Electrostatic Discharge Symposium Proceedings, EOS/ESD 2001
CountryUnited States
CityPortland
Period11/09/0113/09/01

Keywords

  • Bandwidth
  • Charge carriers
  • Electric breakdown
  • Electrodes
  • Electrostatic discharge
  • Electrostatic measurements
  • Reproducibility of results
  • Scanning electron microscopy
  • Surface discharges
  • Voltage

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Bonisch, S., Pommerenke, D., & Kalkner, W. (2001). Broadband measurement of ESD risetimes to distinguish between different discharge mechanisms. In Electrical Overstress/Electrostatic Discharge Symposium Proceedings, EOS/ESD 2001 (pp. 371-382). [5254945] (Electrical Overstress/Electrostatic Discharge Symposium Proceedings; Vol. 2001-January). ESD Association.