Broadband measurement of ESD risetimes to distinguish between different discharge mechanisms

Sven Bönisch; David Pommerenke; Wilfried Kalkner

doi:10.1016/S0304-3886(02)00056-6

Broadband measurement of ESD risetimes to distinguish between different discharge mechanisms

Sven Bönisch^*, David Pommerenke, Wilfried Kalkner

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Abstract

Different discharge mechanisms are possible for electrostatic discharge below 2000 V breakdown voltage as a function of the parameters gap distance, breakdown voltage, electrode material and gas pressure. In this paper, risetime measurement data of electrostatic discharges, measured at about 8 GHz bandwidth, are presented as a function of these parameters. Electrode SEM photographs (scanning electron microscope) helps to understand the influence of electrode surface. This provides information about the development of ESD and helps to increase their reproducibility.

Original language	English
Pages (from-to)	363-383
Number of pages	21
Journal	Journal of Electrostatics
Volume	56
Issue number	3
DOIs	https://doi.org/10.1016/S0304-3886(02)00056-6
Publication status	Published - 1 Oct 2002
Externally published	Yes

Keywords

Arc formation
Breakdown voltage
CMD testing
ESD discharge mechanisms
ESD reproductivity
ESD risetimes
Reproducibility
Short gap
Surface process

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Biotechnology
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

Access to Document

10.1016/S0304-3886(02)00056-6

Cite this

@article{f974ddf6c15643088628ca37180bfeee,

title = "Broadband measurement of ESD risetimes to distinguish between different discharge mechanisms",

abstract = "Different discharge mechanisms are possible for electrostatic discharge below 2000 V breakdown voltage as a function of the parameters gap distance, breakdown voltage, electrode material and gas pressure. In this paper, risetime measurement data of electrostatic discharges, measured at about 8 GHz bandwidth, are presented as a function of these parameters. Electrode SEM photographs (scanning electron microscope) helps to understand the influence of electrode surface. This provides information about the development of ESD and helps to increase their reproducibility.",

keywords = "Arc formation, Breakdown voltage, CMD testing, ESD discharge mechanisms, ESD reproductivity, ESD risetimes, Reproducibility, Short gap, Surface process",

author = "Sven B{\"o}nisch and David Pommerenke and Wilfried Kalkner",

year = "2002",

month = oct,

day = "1",

doi = "10.1016/S0304-3886(02)00056-6",

language = "English",

volume = "56",

pages = "363--383",

journal = "Journal of Electrostatics",

issn = "0304-3886",

publisher = "Elsevier B.V.",

number = "3",

}

TY - JOUR

T1 - Broadband measurement of ESD risetimes to distinguish between different discharge mechanisms

AU - Bönisch, Sven

AU - Pommerenke, David

AU - Kalkner, Wilfried

PY - 2002/10/1

Y1 - 2002/10/1

N2 - Different discharge mechanisms are possible for electrostatic discharge below 2000 V breakdown voltage as a function of the parameters gap distance, breakdown voltage, electrode material and gas pressure. In this paper, risetime measurement data of electrostatic discharges, measured at about 8 GHz bandwidth, are presented as a function of these parameters. Electrode SEM photographs (scanning electron microscope) helps to understand the influence of electrode surface. This provides information about the development of ESD and helps to increase their reproducibility.

AB - Different discharge mechanisms are possible for electrostatic discharge below 2000 V breakdown voltage as a function of the parameters gap distance, breakdown voltage, electrode material and gas pressure. In this paper, risetime measurement data of electrostatic discharges, measured at about 8 GHz bandwidth, are presented as a function of these parameters. Electrode SEM photographs (scanning electron microscope) helps to understand the influence of electrode surface. This provides information about the development of ESD and helps to increase their reproducibility.

KW - Arc formation

KW - Breakdown voltage

KW - CMD testing

KW - ESD discharge mechanisms

KW - ESD reproductivity

KW - ESD risetimes

KW - Reproducibility

KW - Short gap

KW - Surface process

UR - http://www.scopus.com/inward/record.url?scp=0036788249&partnerID=8YFLogxK

U2 - 10.1016/S0304-3886(02)00056-6

DO - 10.1016/S0304-3886(02)00056-6

M3 - Article

AN - SCOPUS:0036788249

SN - 0304-3886

VL - 56

SP - 363

EP - 383

JO - Journal of Electrostatics

JF - Journal of Electrostatics

IS - 3

ER -

Broadband measurement of ESD risetimes to distinguish between different discharge mechanisms

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this