Broadband measurement of ESD risetimes to distinguish between different discharge mechanisms

Sven Bönisch*, David Pommerenke, Wilfried Kalkner

*Corresponding author for this work

Research output: Contribution to journalArticle

Abstract

Different discharge mechanisms are possible for electrostatic discharge below 2000 V breakdown voltage as a function of the parameters gap distance, breakdown voltage, electrode material and gas pressure. In this paper, risetime measurement data of electrostatic discharges, measured at about 8 GHz bandwidth, are presented as a function of these parameters. Electrode SEM photographs (scanning electron microscope) helps to understand the influence of electrode surface. This provides information about the development of ESD and helps to increase their reproducibility.

Original languageEnglish
Pages (from-to)363-383
Number of pages21
JournalJournal of Electrostatics
Volume56
Issue number3
DOIs
Publication statusPublished - 1 Oct 2002
Externally publishedYes

Keywords

  • Arc formation
  • Breakdown voltage
  • CMD testing
  • ESD discharge mechanisms
  • ESD reproductivity
  • ESD risetimes
  • Reproducibility
  • Short gap
  • Surface process

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Biotechnology
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Broadband measurement of ESD risetimes to distinguish between different discharge mechanisms'. Together they form a unique fingerprint.

  • Cite this