An Optical Profilometer for Characterizing Complex Surfaces under High Vacuum Conditions

Katrin Fladischer, D Litwin, J Galas, Roland Lammegger, A. Weeks, D MacLaren, Heinrich Sormann, Wolfgang Ernst, Bodil Holst

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)182-185
JournalPrecision engineering
Volume32
Issue number3
DOIs
Publication statusPublished - 2008

Fields of Expertise

  • Advanced Materials Science

Cite this

An Optical Profilometer for Characterizing Complex Surfaces under High Vacuum Conditions. / Fladischer, Katrin; Litwin, D; Galas, J; Lammegger, Roland; Weeks, A.; MacLaren, D; Sormann, Heinrich; Ernst, Wolfgang; Holst, Bodil.

In: Precision engineering, Vol. 32, No. 3, 2008, p. 182-185.

Research output: Contribution to journalArticleResearchpeer-review

Fladischer, Katrin ; Litwin, D ; Galas, J ; Lammegger, Roland ; Weeks, A. ; MacLaren, D ; Sormann, Heinrich ; Ernst, Wolfgang ; Holst, Bodil. / An Optical Profilometer for Characterizing Complex Surfaces under High Vacuum Conditions. In: Precision engineering. 2008 ; Vol. 32, No. 3. pp. 182-185.
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AU - Ernst, Wolfgang

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