An Optical Profilometer for Characterizing Complex Surfaces under High Vacuum Conditions

Katrin Fladischer; D Litwin; J Galas; Roland Lammegger; A. Weeks; D MacLaren; Heinrich Sormann; Wolfgang Ernst; Bodil Holst

doi:10.1016/j.precisioneng.2007.08.001

An Optical Profilometer for Characterizing Complex Surfaces under High Vacuum Conditions

Katrin Fladischer, D Litwin, J Galas, Roland Lammegger, A. Weeks, D MacLaren, Heinrich Sormann, Wolfgang Ernst, Bodil Holst

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	182-185
Journal	Precision engineering
Volume	32
Issue number	3
DOIs	https://doi.org/10.1016/j.precisioneng.2007.08.001
Publication status	Published - 2008

Fields of Expertise

Advanced Materials Science

Access to Document

10.1016/j.precisioneng.2007.08.001

1 Finished
1 Active

Surface Physics
Tamtögl, A. & Ernst, W.
1/01/07 → …
Project: Research area
EU - INA - Imaging with Neutral Atoms
Ernst, W. & Holst, B.
1/07/04 → 31/12/07
Project: Research project

Cite this

@article{d74ae22d89a0401c98d8603f32b49185,

title = "An Optical Profilometer for Characterizing Complex Surfaces under High Vacuum Conditions",

author = "Katrin Fladischer and D Litwin and J Galas and Roland Lammegger and A. Weeks and D MacLaren and Heinrich Sormann and Wolfgang Ernst and Bodil Holst",

year = "2008",

doi = "10.1016/j.precisioneng.2007.08.001",

language = "English",

volume = "32",

pages = "182--185",

journal = "Precision engineering",

publisher = "Elsevier Inc.",

number = "3",

}

TY - JOUR

T1 - An Optical Profilometer for Characterizing Complex Surfaces under High Vacuum Conditions

AU - Fladischer, Katrin

AU - Litwin, D

AU - Galas, J

AU - Lammegger, Roland

AU - Weeks, A.

AU - MacLaren, D

AU - Sormann, Heinrich

AU - Ernst, Wolfgang

AU - Holst, Bodil

PY - 2008

Y1 - 2008

U2 - 10.1016/j.precisioneng.2007.08.001

DO - 10.1016/j.precisioneng.2007.08.001

M3 - Article

VL - 32

SP - 182

EP - 185

JO - Precision engineering

JF - Precision engineering

IS - 3

ER -

An Optical Profilometer for Characterizing Complex Surfaces under High Vacuum Conditions

Fields of Expertise

Access to Document

Projects

Surface Physics

EU - INA - Imaging with Neutral Atoms

Cite this