An Information-Theoretic Measure for Pattern Similarity in Analog Wafermaps

Bernhard Geiger, Stefan Schrunner, Roman Kern

Research output: Contribution to conferenceAbstractResearchpeer-review

Original languageEnglish
Publication statusPublished - Apr 2019
EventEuropean Advanced Process Control and Manufacturing Conference - Villach, Villach, Austria
Duration: 8 Apr 201910 Apr 2019
http://www.apcm-europe.eu

Conference

ConferenceEuropean Advanced Process Control and Manufacturing Conference
Abbreviated titleapc|m
CountryAustria
CityVillach
Period8/04/1910/04/19
Internet address

Cite this

Geiger, B., Schrunner, S., & Kern, R. (2019). An Information-Theoretic Measure for Pattern Similarity in Analog Wafermaps. Abstract from European Advanced Process Control and Manufacturing Conference, Villach, Austria.

An Information-Theoretic Measure for Pattern Similarity in Analog Wafermaps. / Geiger, Bernhard; Schrunner, Stefan; Kern, Roman.

2019. Abstract from European Advanced Process Control and Manufacturing Conference, Villach, Austria.

Research output: Contribution to conferenceAbstractResearchpeer-review

Geiger, B, Schrunner, S & Kern, R 2019, 'An Information-Theoretic Measure for Pattern Similarity in Analog Wafermaps' European Advanced Process Control and Manufacturing Conference, Villach, Austria, 8/04/19 - 10/04/19, .
Geiger B, Schrunner S, Kern R. An Information-Theoretic Measure for Pattern Similarity in Analog Wafermaps. 2019. Abstract from European Advanced Process Control and Manufacturing Conference, Villach, Austria.
Geiger, Bernhard ; Schrunner, Stefan ; Kern, Roman. / An Information-Theoretic Measure for Pattern Similarity in Analog Wafermaps. Abstract from European Advanced Process Control and Manufacturing Conference, Villach, Austria.
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