An Information-Theoretic Measure for Pattern Similarity in Analog Wafermaps

Bernhard Geiger, Stefan Schrunner, Roman Kern

Research output: Contribution to conferenceAbstract

Original languageEnglish
Publication statusPublished - Apr 2019
EventEuropean Advanced Process Control and Manufacturing Conference - Villach, Villach, Austria
Duration: 8 Apr 201910 Apr 2019
http://www.apcm-europe.eu

Conference

ConferenceEuropean Advanced Process Control and Manufacturing Conference
Abbreviated titleapc|m
CountryAustria
CityVillach
Period8/04/1910/04/19
Internet address

Cite this

Geiger, B., Schrunner, S., & Kern, R. (2019). An Information-Theoretic Measure for Pattern Similarity in Analog Wafermaps. Abstract from European Advanced Process Control and Manufacturing Conference, Villach, Austria.