Alternative Patterning Strategies for Reduced Thermal Stress during Focused Ion Beam Processing

Harald Plank, Roland Schmied, Evelin Fisslthaler, Boril Chernev, Claudia Mayrhofer

Research output: Contribution to conference(Old data) Lecture or Presentation

Original languageGerman
Publication statusPublished - 5 Sept 2011
EventMCM 2011: MCM 2011 - Urbino, Italy
Duration: 4 Sept 20119 Sept 2011

Conference

ConferenceMCM 2011
Abbreviated titleMCM2011
Country/TerritoryItaly
CityUrbino
Period4/09/119/09/11

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)
  • My Favorites
  • Application
  • Experimental

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