Alternative Patterning Strategies for Reduced Thermal Stress during Focused Ion Beam Processing

Harald Plank, Roland Schmied, Evelin Fisslthaler, Boril Chernev, Claudia Mayrhofer

Research output: Contribution to conference(Old data) Lecture or Presentation

Original languageGerman
Publication statusPublished - 5 Sep 2011
EventMCM 2011 - Urbino, Italy
Duration: 4 Sep 20119 Sep 2011

Conference

ConferenceMCM 2011
CountryItaly
CityUrbino
Period4/09/119/09/11

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)
  • My Favorites
  • Application
  • Experimental

Projects

Functional Nanostructures

Dohr, J. & Plank, H.

1/01/09 → …

Project: Research project

Cite this

Plank, H., Schmied, R., Fisslthaler, E., Chernev, B., & Mayrhofer, C. (2011). Alternative Patterning Strategies for Reduced Thermal Stress during Focused Ion Beam Processing. MCM 2011, Urbino, Italy.