Alternative Patterning Strategies for Reduced Thermal Stress during Focused Ion Beam Processing

Harald Plank, Roland Schmied, Evelin Fisslthaler, Boril Chernev, Claudia Mayrhofer

Research output: Contribution to conference(Old data) Lecture or PresentationResearch

Original languageGerman
Publication statusPublished - 5 Sep 2011
EventMCM 2011 - Urbino, Italy
Duration: 4 Sep 20119 Sep 2011

Conference

ConferenceMCM 2011
CountryItaly
CityUrbino
Period4/09/119/09/11

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)
  • My Favorites
  • Application
  • Experimental

Cite this

Plank, H., Schmied, R., Fisslthaler, E., Chernev, B., & Mayrhofer, C. (2011). Alternative Patterning Strategies for Reduced Thermal Stress during Focused Ion Beam Processing. MCM 2011, Urbino, Italy.

Alternative Patterning Strategies for Reduced Thermal Stress during Focused Ion Beam Processing. / Plank, Harald; Schmied, Roland; Fisslthaler, Evelin; Chernev, Boril; Mayrhofer, Claudia.

2011. MCM 2011, Urbino, Italy.

Research output: Contribution to conference(Old data) Lecture or PresentationResearch

Plank, H, Schmied, R, Fisslthaler, E, Chernev, B & Mayrhofer, C 2011, 'Alternative Patterning Strategies for Reduced Thermal Stress during Focused Ion Beam Processing' MCM 2011, Urbino, Italy, 4/09/11 - 9/09/11, .
Plank H, Schmied R, Fisslthaler E, Chernev B, Mayrhofer C. Alternative Patterning Strategies for Reduced Thermal Stress during Focused Ion Beam Processing. 2011. MCM 2011, Urbino, Italy.
Plank, Harald ; Schmied, Roland ; Fisslthaler, Evelin ; Chernev, Boril ; Mayrhofer, Claudia. / Alternative Patterning Strategies for Reduced Thermal Stress during Focused Ion Beam Processing. MCM 2011, Urbino, Italy.
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T1 - Alternative Patterning Strategies for Reduced Thermal Stress during Focused Ion Beam Processing

AU - Plank, Harald

AU - Schmied, Roland

AU - Fisslthaler, Evelin

AU - Chernev, Boril

AU - Mayrhofer, Claudia

PY - 2011/9/5

Y1 - 2011/9/5

M3 - (Altdaten) Vortrag oder Präsentation

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