Alternative Pattering Strategies for Reduced Thermal Stress during Focused Ion Beam Processing

Harald Plank, Roland Schmied, Evelin Fisslthaler, Boril Stefanov Chernev, Claudia Mayrhofer

Research output: Chapter in Book/Report/Conference proceedingConference paper

Original languageEnglish
Title of host publicationMultinational Congress on Microscopy
Publisher.
Pages131-132
Publication statusPublished - 2011
EventMultinational Congress on Microscopy - Graz, Austria
Duration: 30 Aug 20094 Sep 2009

Conference

ConferenceMultinational Congress on Microscopy
CountryAustria
CityGraz
Period30/08/094/09/09

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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