Abstract
While the general interest in nano-plasmonics is still unbroken, there is an increasing trend towards the integration in real applications such as direct nano-emitters or high performance sensors [1]. Aside of novel concepts, versatile fabrication methods are in demand, which provide a high degree of flexibility concerning design and manufacturing possibilities. Although traditional methods, such as e-beam lithography, are very powerful, well established and reliable, they are often limited in their applicability (e.g. flat surfaces). In contrast, additive direct-write manufacturing may overcome such limitations, although techniques for reliable sub-100 nm fabrication are only a few [2]. In that respect, focused electron beam induced deposition (FEBID) is one of the promising candidates, which not only meets resolution requirements, but also allows true 3D nano-printing on a broad range of materials and almost any surface morphology [3]. As FEBID materials notoriously suffer from high carbon contents, chemical post-growth transfer into pure materials is indispensably needed, which can severely harm or even destroy FEBID-based 3D nano-architectures. Following that challenge, we have dissected FEBID growth characteristics and combined individual advantages via advanced patterning approaches. That allows direct-write fabrication of high-fidelity shapes with nanoscale features in the sub-10 nm range, which allow a shape-stable chemical transfer into plasmonically active Au nano-antennas. Consequently, this contribution ranges from initial 3D-FEBID fabrication over purification towards confirmation of the originally intended plasmonic functionality [4]. The latter is compared to theoretical modelling, which reveals very good agreement and underlines the reliability of 3D-FEBID as generic approach towards more complex 3D nano-concepts for future applications.
[1] Plank et al., Micromachines, 11, 1 (2020)
[2] Hirt et al., Adv. Mater., 29, 17 (2017)
[3] Winkler et al., J. Appl. Phys., 125, 21 (2019)
[4] Kuhness et al., ACS Appl. Mater. Interfaces, 13, 1, 1178 (2021)
[1] Plank et al., Micromachines, 11, 1 (2020)
[2] Hirt et al., Adv. Mater., 29, 17 (2017)
[3] Winkler et al., J. Appl. Phys., 125, 21 (2019)
[4] Kuhness et al., ACS Appl. Mater. Interfaces, 13, 1, 1178 (2021)
Original language | English |
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Publication status | Published - 13 Sept 2021 |
Event | 2021 European Congress and Exhibition on Advanced Materials and Processes : EUROMAT 2021 - Virtuell, Virtuell, Austria Duration: 13 Sept 2021 → 17 Sept 2021 https://www.euromat2021.org/ |
Conference
Conference | 2021 European Congress and Exhibition on Advanced Materials and Processes |
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Abbreviated title | EUROMAT 2021 |
Country/Territory | Austria |
City | Virtuell |
Period | 13/09/21 → 17/09/21 |
Internet address |
Fields of Expertise
- Advanced Materials Science