A Variable Gas Injection System for Rapid Precursor Testing in Focused Electron Beam Induced Deposition

Robert Winkler, Georg Arnold, Jürgen Sattelkow, Andrew Smith, Harald Plank

Research output: Contribution to conferencePoster

Original languageEnglish
Publication statusPublished - 2018
EventTagung der Deutschen Physikalischen Gesellschaft e.V. - Berlin, Germany
Duration: 11 Mar 201816 Mar 2018

Conference

ConferenceTagung der Deutschen Physikalischen Gesellschaft e.V.
Abbreviated titleDPG-Tagung
CountryGermany
CityBerlin
Period11/03/1816/03/18

ASJC Scopus subject areas

  • Materials Science(all)

Fields of Expertise

  • Advanced Materials Science

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