A methodology for predictive maintenance in semiconductor manufacturing

Peter Scheibelhofer, Dietmar Gleispach, Guenther Hayderer, Ernst Stadlober

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)161-173
JournalAustrian Journal of Statistics
Volume41
Issue number3
Publication statusPublished - 2012

Fields of Expertise

  • Information, Communication & Computing

Treatment code (Nähere Zuordnung)

  • Application

Projects

Statistical Modeling

Stadlober, E. & Friedl, H.

1/01/90 → …

Project: Research area

Cite this