A methodology for predictive maintenance in semiconductor manufacturing

Peter Scheibelhofer, Dietmar Gleispach, Guenther Hayderer, Ernst Stadlober

Research output: Contribution to journalArticle

LanguageEnglish
Pages161-173
JournalAustrian journal of statistics
Volume41
Issue number3
StatusPublished - 2012

Fields of Expertise

  • Information, Communication & Computing

Treatment code (Nähere Zuordnung)

  • Application

Cite this

A methodology for predictive maintenance in semiconductor manufacturing. / Scheibelhofer, Peter; Gleispach, Dietmar; Hayderer, Guenther; Stadlober, Ernst.

In: Austrian journal of statistics, Vol. 41, No. 3, 2012, p. 161-173.

Research output: Contribution to journalArticle

Scheibelhofer, P, Gleispach, D, Hayderer, G & Stadlober, E 2012, 'A methodology for predictive maintenance in semiconductor manufacturing' Austrian journal of statistics, vol 41, no. 3, pp. 161-173.
Scheibelhofer, Peter ; Gleispach, Dietmar ; Hayderer, Guenther ; Stadlober, Ernst. / A methodology for predictive maintenance in semiconductor manufacturing. In: Austrian journal of statistics. 2012 ; Vol. 41, No. 3. pp. 161-173
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