A methodology for predictive maintenance in semiconductor manufacturing

Peter Scheibelhofer; Dietmar Gleispach; Guenther Hayderer; Ernst Stadlober

A methodology for predictive maintenance in semiconductor manufacturing

Peter Scheibelhofer, Dietmar Gleispach, Guenther Hayderer, Ernst Stadlober

Institute of Statistics (5060)

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	161-173
Journal	Austrian Journal of Statistics
Volume	41
Issue number	3
Publication status	Published - 2012

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Information, Communication & Computing

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@article{bab8d61041e447da96e3a21fac4fe8e4,

title = "A methodology for predictive maintenance in semiconductor manufacturing",

author = "Peter Scheibelhofer and Dietmar Gleispach and Guenther Hayderer and Ernst Stadlober",

year = "2012",

language = "English",

volume = "41",

pages = "161--173",

journal = "Austrian Journal of Statistics",

issn = "1026-597X",

publisher = "Austrian Society for Statistics",

number = "3",

}

TY - JOUR

T1 - A methodology for predictive maintenance in semiconductor manufacturing

AU - Scheibelhofer, Peter

AU - Gleispach, Dietmar

AU - Hayderer, Guenther

AU - Stadlober, Ernst

PY - 2012

Y1 - 2012

UR - http://www.stat.tugraz.at/AJS/

M3 - Article

SN - 1026-597X

VL - 41

SP - 161

EP - 173

JO - Austrian Journal of Statistics

JF - Austrian Journal of Statistics

IS - 3

ER -

A methodology for predictive maintenance in semiconductor manufacturing

Fields of Expertise

Treatment code (Nähere Zuordnung)

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Statistical Modeling

Cite this

A methodology for predictive maintenance in semiconductor manufacturing

Fields of Expertise

Treatment code (Nähere Zuordnung)

Other files and links

Projects

Statistical Modeling

Cite this