A methodology for predictive maintenance in semiconductor manufacturing

Peter Scheibelhofer, Dietmar Gleispach, Guenther Hayderer, Ernst Stadlober

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)161-173
JournalAustrian Journal of Statistics
Volume41
Issue number3
Publication statusPublished - 2012

Fields of Expertise

  • Information, Communication & Computing

Treatment code (Nähere Zuordnung)

  • Application

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