A Method to Measure the Total Scattering Cross Section and Effective Beam Gas Path Length in a Low-Vacuum SEM

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)1-7
JournalScanning
Issue number31
DOIs
Publication statusPublished - 2009

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

Cite this

@article{8a1fa9814a884983bc96742fb0c3d7d9,
title = "A Method to Measure the Total Scattering Cross Section and Effective Beam Gas Path Length in a Low-Vacuum SEM",
author = "Johannes Rattenberger and Julian Wagner and Hartmuth Schr{\"o}ttner and Stefan Mitsche and Armin Zankel",
year = "2009",
doi = "10.1002/sca.20148",
language = "English",
pages = "1--7",
journal = "Scanning",
issn = "0161-0457",
publisher = "John Wiley and Sons Inc.",
number = "31",

}

TY - JOUR

T1 - A Method to Measure the Total Scattering Cross Section and Effective Beam Gas Path Length in a Low-Vacuum SEM

AU - Rattenberger, Johannes

AU - Wagner, Julian

AU - Schröttner, Hartmuth

AU - Mitsche, Stefan

AU - Zankel, Armin

PY - 2009

Y1 - 2009

U2 - 10.1002/sca.20148

DO - 10.1002/sca.20148

M3 - Article

SP - 1

EP - 7

JO - Scanning

JF - Scanning

SN - 0161-0457

IS - 31

ER -