A Method to Measure the Total Scattering Cross Section and Effective Beam Gas Path Length in a Low-Vacuum SEM

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)1-7
JournalScanning
Issue number31
DOIs
Publication statusPublished - 2009

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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