A comprehensive EELS/EFTEM study of focused ion beam prepared samples of nitride- and oxide thin films

Michael Rogers, Gerald Kothleitner, Bernhard Schaffer, W. Waldhauser

Research output: Contribution to conference › Poster

Original language	English
Publication status	Published - 2005
Event	EDGE 2005 - Grundlsee Duration: 1 May 2005 → 5 May 2005

Cite this

@conference{ee62fbd4a9774cd8b77b94d54791ba35,

title = "A comprehensive EELS/EFTEM study of focused ion beam prepared samples of nitride- and oxide thin films",

author = "Michael Rogers and Gerald Kothleitner and Bernhard Schaffer and W. Waldhauser",

year = "2005",

language = "English",

note = "EDGE 2005 ; Conference date: 01-05-2005 Through 05-05-2005",

}