A combined X-ray, ellipsometry and atomic force microscopy study on thin parylene-C films

Heinz-Georg Flesch; Oliver Werzer; Martin Weis; Jan Jakabovic; Jaroslav Kovac; Daniel Hasko; Georg Jakopic; Harry J Wondergem; Roland Resel

doi:10.1002/pssa.200881616

A combined X-ray, ellipsometry and atomic force microscopy study on thin parylene-C films

Heinz-Georg Flesch, Oliver Werzer, Martin Weis, Jan Jakabovic, Jaroslav Kovac, Daniel Hasko, Georg Jakopic, Harry J Wondergem, Roland Resel

Institute of Solid State Physics (5130)

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1727-1730
Journal	Physica Status Solidi / A
Volume	206
Issue number	8
DOIs	https://doi.org/10.1002/pssa.200881616
Publication status	Published - 2009

Treatment code (Nähere Zuordnung)

Basic - Fundamental (Grundlagenforschung)
Experimental

Access to Document

10.1002/pssa.200881616

Cite this

A combined X-ray, ellipsometry and atomic force microscopy study on thin parylene-C films. / Flesch, Heinz-Georg; Werzer, Oliver; Weis, Martin; Jakabovic, Jan; Kovac, Jaroslav; Hasko, Daniel; Jakopic, Georg; Wondergem, Harry J; Resel, Roland.

In: Physica Status Solidi / A, Vol. 206, No. 8, 2009, p. 1727-1730.

Research output: Contribution to journal › Article › peer-review

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AU - Weis, Martin

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AU - Kovac, Jaroslav

AU - Hasko, Daniel

AU - Jakopic, Georg

AU - Wondergem, Harry J

AU - Resel, Roland

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JF - Physica Status Solidi / A

SN - 1862-6300

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