A combined X-ray, ellipsometry and atomic force microscopy study on thin parylene-C films

Heinz-Georg Flesch, Oliver Werzer, Martin Weis, Jan Jakabovic, Jaroslav Kovac, Daniel Hasko, Georg Jakopic, Harry J Wondergem, Roland Resel

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)1727-1730
JournalPhysica Status Solidi / A
Issue number8
Publication statusPublished - 2009

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)
  • Experimental

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