A combined X-ray, ellipsometry and atomic force microscopy study on thin parylene-C films

Heinz-Georg Flesch; Oliver Werzer; Martin Weis; Jan Jakabovic; Jaroslav Kovac; Daniel Hasko; Georg Jakopic; Harry J Wondergem; Roland Resel

doi:10.1002/pssa.200881616

A combined X-ray, ellipsometry and atomic force microscopy study on thin parylene-C films

Heinz-Georg Flesch, Oliver Werzer, Martin Weis, Jan Jakabovic, Jaroslav Kovac, Daniel Hasko, Georg Jakopic, Harry J Wondergem, Roland Resel

Institute of Solid State Physics (5130)

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	1727-1730
Journal	Physica status solidi / A
Volume	206
Issue number	8
DOIs	https://doi.org/10.1002/pssa.200881616
Publication status	Published - 2009

Treatment code (Nähere Zuordnung)

Basic - Fundamental (Grundlagenforschung)
Experimental

Access to Document

10.1002/pssa.200881616

Cite this

@article{8adc7e282fd14e2dbd719b2137323d6b,

title = "A combined X-ray, ellipsometry and atomic force microscopy study on thin parylene-C films",

author = "Heinz-Georg Flesch and Oliver Werzer and Martin Weis and Jan Jakabovic and Jaroslav Kovac and Daniel Hasko and Georg Jakopic and Wondergem, {Harry J} and Roland Resel",

year = "2009",

doi = "10.1002/pssa.200881616",

language = "English",

volume = "206",

pages = "1727--1730",

journal = "Physica status solidi / A",

issn = "1862-6300",

publisher = "Wiley-VCH",

number = "8",

}

TY - JOUR

T1 - A combined X-ray, ellipsometry and atomic force microscopy study on thin parylene-C films

AU - Flesch, Heinz-Georg

AU - Werzer, Oliver

AU - Weis, Martin

AU - Jakabovic, Jan

AU - Kovac, Jaroslav

AU - Hasko, Daniel

AU - Jakopic, Georg

AU - Wondergem, Harry J

AU - Resel, Roland

PY - 2009

Y1 - 2009

U2 - 10.1002/pssa.200881616

DO - 10.1002/pssa.200881616

M3 - Article

VL - 206

SP - 1727

EP - 1730

JO - Physica status solidi / A

JF - Physica status solidi / A

SN - 1862-6300

IS - 8

ER -