A combined X-ray, ellipsometry and atomic force microscopy study on thin parylene-C films

Heinz-Georg Flesch, Oliver Werzer, Martin Weis, Jan Jakabovic, Jaroslav Kovac, Daniel Hasko, Georg Jakopic, Harry J Wondergem, Roland Resel

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)1727-1730
JournalPhysica status solidi / A
Volume206
Issue number8
DOIs
Publication statusPublished - 2009

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)
  • Experimental

Cite this

A combined X-ray, ellipsometry and atomic force microscopy study on thin parylene-C films. / Flesch, Heinz-Georg; Werzer, Oliver; Weis, Martin; Jakabovic, Jan; Kovac, Jaroslav; Hasko, Daniel; Jakopic, Georg; Wondergem, Harry J; Resel, Roland.

In: Physica status solidi / A, Vol. 206, No. 8, 2009, p. 1727-1730.

Research output: Contribution to journalArticleResearchpeer-review

Flesch, H-G, Werzer, O, Weis, M, Jakabovic, J, Kovac, J, Hasko, D, Jakopic, G, Wondergem, HJ & Resel, R 2009, 'A combined X-ray, ellipsometry and atomic force microscopy study on thin parylene-C films' Physica status solidi / A, vol. 206, no. 8, pp. 1727-1730. https://doi.org/10.1002/pssa.200881616
Flesch, Heinz-Georg ; Werzer, Oliver ; Weis, Martin ; Jakabovic, Jan ; Kovac, Jaroslav ; Hasko, Daniel ; Jakopic, Georg ; Wondergem, Harry J ; Resel, Roland. / A combined X-ray, ellipsometry and atomic force microscopy study on thin parylene-C films. In: Physica status solidi / A. 2009 ; Vol. 206, No. 8. pp. 1727-1730.
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AU - Flesch, Heinz-Georg

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AU - Weis, Martin

AU - Jakabovic, Jan

AU - Kovac, Jaroslav

AU - Hasko, Daniel

AU - Jakopic, Georg

AU - Wondergem, Harry J

AU - Resel, Roland

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