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  • Julian Pilz
2019

On the transformation of "zincone"-like into porous ZnO thin films from sub-saturated plasma enhanced atomic layer deposition

Perrotta, A., Pilz, J., Pachmajer, S., Milella, A. & Coclite, A. M., 1 Jan 2019, In : Beilstein Journal of Nanotechnology . 10, p. 746-759 14 p.

Research output: Contribution to journalArticleResearchpeer-review

Open Access

Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study

Perrotta, A., Pilz, J., Milella, A. & Coclite, A. M., 31 Jul 2019, In : Applied Surface Science. 483, p. 10-18 9 p.

Research output: Contribution to journalArticleResearchpeer-review

Open Access

Universal software for the real-time control of sequential processing techniques

Pilz, J., Tazreiter, M. & Coclite, A. M., 1 Nov 2019, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 37, 6, 063201.

Research output: Contribution to journalArticleResearchpeer-review

Open Access
Open Access
2018

Tuning Material Properties of ZnO Thin Films for Advanced Sensor Applications

Pilz, J., Perrotta, A. & Coclite, A. M., 3 Dec 2018, In : Proceedings MDPI.

Research output: Contribution to journalConference articleResearchpeer-review

Open Access

Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature

Pilz, J., Perrotta, A., Christian, P., Tazreiter, M., Resel, R., Leising, G., Griesser, T. & Coclite, A. M., 1 Jan 2018, In : Journal of vacuum science & technology / A. 36, 1, 01A109.

Research output: Contribution to journalArticleResearchpeer-review

Open Access
2017

Tuning of optical and structural properties of ZnO deposited by room temperature-plasma assisted atomic layer deposition

Perrotta, A., Pilz, J. & Coclite, A. M., 2 Nov 2017.

Research output: Contribution to conference(Old data) Lecture or PresentationResearch