3D Integration of MEMS and IC: Design, Technology and Simulations

Maaike Taklo, Kari Schjølberg-Henriksen, Nicolas Lietaer, Josef Prainsack, Anders Elfving, Josef Weber, Matthias Klein, Peter Schneider, Sven Reitz

Research output: Chapter in Book/Report/Conference proceedingChapterResearch

Original languageEnglish
Title of host publicationAdvanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
PublisherSpringer Netherlands
Pages191-203
Volume3
Edition1
ISBN (Print)978-90-481-3805-0
DOIs
Publication statusPublished - 2010

Publication series

NameNATO Science for Peace and Security Series B: Physics and Biophysics
PublisherSpringer Netherlands

Treatment code (Nähere Zuordnung)

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Cite this

Taklo, M., Schjølberg-Henriksen, K., Lietaer, N., Prainsack, J., Elfving, A., Weber, J., ... Reitz, S. (2010). 3D Integration of MEMS and IC: Design, Technology and Simulations. In Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators (1 ed., Vol. 3, pp. 191-203). (NATO Science for Peace and Security Series B: Physics and Biophysics). Springer Netherlands. https://doi.org/10.1007/978-90-481-3807-4