3D Integration of MEMS and IC: Design, Technology and Simulations

Maaike Taklo, Kari Schjølberg-Henriksen, Nicolas Lietaer, Josef Prainsack, Anders Elfving, Josef Weber, Matthias Klein, Peter Schneider, Sven Reitz

Research output: Chapter in Book/Report/Conference proceedingChapterResearch

Original languageEnglish
Title of host publicationAdvanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
PublisherSpringer Netherlands
Pages191-203
Volume3
Edition1
ISBN (Print)978-90-481-3805-0
DOIs
Publication statusPublished - 2010

Publication series

NameNATO Science for Peace and Security Series B: Physics and Biophysics
PublisherSpringer Netherlands

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Taklo, M., Schjølberg-Henriksen, K., Lietaer, N., Prainsack, J., Elfving, A., Weber, J., ... Reitz, S. (2010). 3D Integration of MEMS and IC: Design, Technology and Simulations. In Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators (1 ed., Vol. 3, pp. 191-203). (NATO Science for Peace and Security Series B: Physics and Biophysics). Springer Netherlands. https://doi.org/10.1007/978-90-481-3807-4

3D Integration of MEMS and IC: Design, Technology and Simulations. / Taklo, Maaike; Schjølberg-Henriksen, Kari; Lietaer, Nicolas; Prainsack, Josef; Elfving, Anders; Weber, Josef; Klein, Matthias; Schneider, Peter; Reitz, Sven.

Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators. Vol. 3 1. ed. Springer Netherlands, 2010. p. 191-203 (NATO Science for Peace and Security Series B: Physics and Biophysics).

Research output: Chapter in Book/Report/Conference proceedingChapterResearch

Taklo, M, Schjølberg-Henriksen, K, Lietaer, N, Prainsack, J, Elfving, A, Weber, J, Klein, M, Schneider, P & Reitz, S 2010, 3D Integration of MEMS and IC: Design, Technology and Simulations. in Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators. 1 edn, vol. 3, NATO Science for Peace and Security Series B: Physics and Biophysics, Springer Netherlands, pp. 191-203. https://doi.org/10.1007/978-90-481-3807-4
Taklo M, Schjølberg-Henriksen K, Lietaer N, Prainsack J, Elfving A, Weber J et al. 3D Integration of MEMS and IC: Design, Technology and Simulations. In Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators. 1 ed. Vol. 3. Springer Netherlands. 2010. p. 191-203. (NATO Science for Peace and Security Series B: Physics and Biophysics). https://doi.org/10.1007/978-90-481-3807-4
Taklo, Maaike ; Schjølberg-Henriksen, Kari ; Lietaer, Nicolas ; Prainsack, Josef ; Elfving, Anders ; Weber, Josef ; Klein, Matthias ; Schneider, Peter ; Reitz, Sven. / 3D Integration of MEMS and IC: Design, Technology and Simulations. Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators. Vol. 3 1. ed. Springer Netherlands, 2010. pp. 191-203 (NATO Science for Peace and Security Series B: Physics and Biophysics).
@inbook{7d5f5e3742784a84b0c6a2c9c60e87f5,
title = "3D Integration of MEMS and IC: Design, Technology and Simulations",
author = "Maaike Taklo and Kari Schj{\o}lberg-Henriksen and Nicolas Lietaer and Josef Prainsack and Anders Elfving and Josef Weber and Matthias Klein and Peter Schneider and Sven Reitz",
year = "2010",
doi = "10.1007/978-90-481-3807-4",
language = "English",
isbn = "978-90-481-3805-0",
volume = "3",
series = "NATO Science for Peace and Security Series B: Physics and Biophysics",
publisher = "Springer Netherlands",
pages = "191--203",
booktitle = "Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators",
address = "Netherlands",
edition = "1",

}

TY - CHAP

T1 - 3D Integration of MEMS and IC: Design, Technology and Simulations

AU - Taklo, Maaike

AU - Schjølberg-Henriksen, Kari

AU - Lietaer, Nicolas

AU - Prainsack, Josef

AU - Elfving, Anders

AU - Weber, Josef

AU - Klein, Matthias

AU - Schneider, Peter

AU - Reitz, Sven

PY - 2010

Y1 - 2010

U2 - 10.1007/978-90-481-3807-4

DO - 10.1007/978-90-481-3807-4

M3 - Chapter

SN - 978-90-481-3805-0

VL - 3

T3 - NATO Science for Peace and Security Series B: Physics and Biophysics

SP - 191

EP - 203

BT - Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators

PB - Springer Netherlands

ER -