EFTEM-EELS investigation of thin RTP-vanadium nitride layers on silicon wafers

  • Warbichler, Peter (Co-Investigator (CoI))
  • Brunegger, Albert (Co-Investigator (CoI))
  • Hofer, Ferdinand (Principal Investigator (PI))
  • Brunegger, Margit (Co-Investigator (CoI))

Project: Research area

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Chemistry

Material Science

Engineering