ZnO thin films grown by plasma-enhanced atomic layer deposition: material properties in and outside the ALD window

Pilz, J. (Speaker), Perrotta, A. (Contributor), Leising, G. (Contributor), Coclite, A. M. (Contributor)

Activity: Talk or presentationTalk at conference or symposiumScience to science

Period28 Jun 2019
Held atEuroCVD 22 Baltic ALD 16 Conference
Event typeConference
LocationLuxembourg, Luxembourg

Keywords

  • Advanced Materials Science