Temperature Effect on ZnO by Plasma-Enhanced Atomic Layer Deposition

Pilz, J. (Speaker), Perrotta, A. (Contributor), Coclite, A. M. (Contributor)

Activity: Talk or presentationTalk at conference or symposiumScience to science

Period22 Oct 2018
Held atAVS 65th International Symposium & Exhibition 2018
Event typeConference
LocationLong Beach, United States