Study of the properties of Al:ZnO thin films grown by plasma-enhanced atomic layer deposition

Pilz, J. (Speaker), Benjamin Sorgmann (Contributor), Alberto Perrotta (Contributor), Coclite, A. M. (Contributor)

Activity: Talk or presentationTalk at conference or symposiumScience to science

Period11 Jun 2019
Held at24th International Symposium on Plasma Chemistry
Event typeConference
LocationNaples, Italy


  • Advanced Materials Science