Study of the properties of Al:ZnO thin films grown by plasma-enhanced atomic layer deposition

  • Julian Pilz (Speaker)
  • Benjamin Sorgmann (Contributor)
  • Alberto Perrotta (Contributor)
  • Coclite, A. M. (Contributor)

Activity: Talk or presentationTalk at conference or symposiumScience to science

Period11 Jun 2019
Event title24th International Symposium on Plasma Chemistry
Event typeConference
LocationNaples, Italy

Fields of Expertise

  • Advanced Materials Science