Model-Based Temperature Control in Thermal Processing of Semiconductor Wafers

  • Koch, S. (Speaker)
  • Alexander Schaum (Contributor)
  • Martin Kleindienst (Contributor)
  • Reichhartinger, M. (Contributor)
  • Thomas Meurer (Contributor)
  • Jaime A. Moreno (Contributor)
  • Horn, M. (Contributor)

Activity: Talk or presentationTalk at conference or symposiumScience to science

Period22 Sep 2022
Event title4th IFAC Workshop on Control of Systems Governed by Partial Differential Equations
Event typeConference
LocationKiel, GermanyShow on map
Degree of RecognitionInternational