Influence of Substrate Temperature on Structural, Optical, and Electrical Properties of ZnO Deposited by Plasma-Enhanced Atomic Layer Depositon

  • Julian Pilz (Speaker)
  • Alberto Perrotta (Contributor)
  • Coclite, A. M. (Contributor)

Activity: Talk or presentationTalk at conference or symposiumScience to science

Period11 Sep 2018
Event title68th Annual Meeting of the Austrian Physical Society
Event typeConference
Conference number68
LocationGraz, Austria

Fields of Expertise

  • Advanced Materials Science