Influence of Substrate Temperature on Structural, Optical, and Electrical Properties of ZnO Deposited by Plasma-Enhanced Atomic Layer Depositon

Pilz, J. (Speaker), Perrotta, A. (Contributor), Coclite, A. M. (Contributor)

Activity: Talk or presentationTalk at conference or symposiumScience to science

Period11 Sep 2018
Held at68th Annual Meeting of the Austrian Physical Society
Event typeConference
Conference number68
LocationGraz, Austria

Keywords

  • Advanced Materials Science