Efficient Temperature Profile Estimation for Silicon Wafers Based on Subspace Observers

Tranninger, M. (Speaker)

Activity: Talk or presentationTalk at conference or symposiumScience to science

Period12 Jul 202017 Jul 2020
Event titleIFAC 2020 World Congress: Automatic Control – Meeting Societal Challenges
Event typeConference
LocationVirtuell, Germany
Degree of RecognitionInternational