Efficient Temperature Profile Estimation for Silicon Wafers Based on Subspace Observers

  • Markus Tranninger (Speaker)

Activity: Talk or presentation › Talk at conference or symposium › Science to science

Period12 Jul 2020 → 17 Jul 2020
Event titleIFAC 2020 World Congress: Automatic Control – Meeting Societal Challenges
Event typeConference
LocationVirtuell, GermanyShow on map
Degree of RecognitionInternational

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