Deep X-ray Lithography: the instrument

Marmiroli, B. (Speaker)

Activity: Talk or presentationTalk at workshop, seminar or courseScience to science

Period18 Apr 2017
Held atAdvances in Small Angle X-Ray Scattering and Deep X-Ray Litography
Event typeWorkshop
LocationBuenos Aires, Argentina
Degree of RecognitionInternational

Keywords

  • DXRL
  • irradiation dose
  • microfabrication
  • Advanced Materials Science