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Alternative Patterning Strategies for Reduced Thermal Stress during Focused Ion Beam Processing
Plank, H.
(Speaker)
Institute of Electron Microscopy and Nanoanalysis (5190)
Activity
:
Talk or presentation
›
Invited talk at conference or symposium
›
Science to science
Period
4 Sept 2011
→
9 Sept 2011
Event title
MCM 2011: MCM 2011
Event type
Conference
Location
Urbino, Italy
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Keywords
Focused Ion Beam Processing
Soft Matter