Surface layer destruction during ion beam analysis

R. Behrisch, W. von der Linden, U. von Toussaint, D. Grambole

Publikation: Beitrag in einer FachzeitschriftArtikelForschungBegutachtung

Abstract

In ion beam analysis the decrease of the measuring signal with a number of incident ions, due to a destruction of the surface layer being analysed, depends critically on the lateral intensity distribution in the analysing ion beam. For the assumption of destruction in one step, the decrease was calculated and the obtained analytical formulae was fitted to the decrease as measured in ERDA and PIXE analyses. This allows to obtain values for the destruction cross sections for the ions and the samples in the analysis, as well as information about the lateral intensity distribution in the analysing ion beam.
Originalspracheenglisch
Seiten (von - bis)440-446
Seitenumfang7
FachzeitschriftNuclear instruments & methods in physics research / B
Jahrgang155
Ausgabenummer4
DOIs
PublikationsstatusVeröffentlicht - 1 Sep 1999

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Ion beams
destruction
surface layers
ion beams
Information analysis
Ions
ions
cross sections

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Surface layer destruction during ion beam analysis. / Behrisch, R.; von der Linden, W.; von Toussaint, U.; Grambole, D.

in: Nuclear instruments & methods in physics research / B, Jahrgang 155, Nr. 4, 01.09.1999, S. 440-446.

Publikation: Beitrag in einer FachzeitschriftArtikelForschungBegutachtung

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